ASMC 2001the 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 23-24, International Conference Center, Munich Germany / sponsored by: [IEEE] Electron Devices Society ... [et al.].
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IEEE, SEMI , Piscataway, New Jersey, San Jose, California
Semiconductor industry -- Congresses, Semiconductors -- Design and construction -- Congresses, Process control -- Congr
|Other titles||2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop., Advancing the science of semiconductor manufacturing excellence., Advanced Semiconductor Manufacturing Conference and Workshop., Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI.|
|Contributions||IEEE Electron Devices Society., Semiconductor Equipment and Materials International.|
|The Physical Object|
|Pagination||[xi], 244 p. :|
|ISBN 10||0780365550, 0780365569|
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