Cover of: ASMC 2001 | IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (12th 2001 Munich, Germany)

ASMC 2001

the 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 23-24, International Conference Center, Munich Germany / sponsored by: [IEEE] Electron Devices Society ... [et al.].
  • 244 Pages
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by
IEEE, SEMI , Piscataway, New Jersey, San Jose, California
Semiconductor industry -- Congresses, Semiconductors -- Design and construction -- Congresses, Process control -- Congr
Other titles2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop., Advancing the science of semiconductor manufacturing excellence., Advanced Semiconductor Manufacturing Conference and Workshop., Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI.
GenreCongresses.
ContributionsIEEE Electron Devices Society., Semiconductor Equipment and Materials International.
The Physical Object
Pagination[xi], 244 p. :
ID Numbers
Open LibraryOL21462621M
ISBN 100780365550, 0780365569
OCLC/WorldCa48083177

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